Semiconductor device
AssigneeRenesas Technology Corp.
InventorsYasuhiro Ido, Kazushi Kono, Takeshi Iwamoto
Life of this patent
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Abstract
On a semiconductor substrate a silicon oxide film is formed and provided with a recess. In the recess a reflector layer of copper is disposed as a blocking layer with a barrier metal posed therebetween. The reflector layer of copper is covered with a silicon oxide film and thereon a fuse region provided with a plurality of fuses is provided. The reflector layer of copper has a plane of reflection recessed downward to reflect a laser beam. The reflector layer of copper is arranged to overlap substantially the entirety of the fuse region, as seen in a plane. A laser beam radiated to blow the fuse can have a reduced effect on a vicinity of the fuse region. A semiconductor device reduced in size can be obtained.
Claims13
1-12. (canceled)
A semiconductor device, comprising:
- a semiconductor substrate having a main surface;
- a plurality of fuses formed in a predetermined conductive layer over said main surface of said semiconductor substrate;
- and
- a blocking layer disposed between said predetermined conductive layer and said main surface of said semiconductor substrate,
- wherein said blocking layer has a reflection plane which reflects the laser beam in the direction that the reflected laser beam recedes from said main surface,
- wherein a recess as said reflection plane is arranged to overlay said plurality of fuses, as seen in a plane, and
- wherein said reflection plane dishes in the direction of said main surface from said plurality of fuses.
A semiconductor device, comprising:
- a semiconductor substrate having a main surface;
- a plurality of fuses formed in a conductive layer over said main surface of said semiconductor substrate;
- and
- a blocking layer disposed between said conductive layer and said main surface of said semiconductor substrate,
- wherein said blocking layer has a reflection plane which reflects the laser beam, wherein a recess as said reflection plane is arranged to overlay said plurality of fuses, as seen in a plane, and
- wherein said reflection plane dishes in the direction of said main surface from said plurality of fuses,
- wherein said blocking layer has a barrier metal and a copper metal on said barrier metal,
- wherein there is said reflection plane on the surface of said copper metal.
Dependencies are inferred from the claim text.