Gas supply system and processing system

A processing system comprising:

• a processing apparatus including a gas injection means for injecting a specific material gas into a processing vessel in order to provide specific processing to an object to be processed, said material gas being produced from metallic compound material with low vapor pressure;
• and a gas supply system for supplying said specific material gas to said gas injection means, wherein:
• said gas injection means is a showerhead portion;
• and
• said gas supply system is characterized by comprising:
• a gas passage extending upwardly from said showerhead portion;
• a material reservoir tank attached to an upper-end portion of said gas passage for containing said metallic compound material therein;
• and
• an open/close valve for opening/closing said gas passage.

A processing system comprising:

• a processing apparatus including a gas injection means for injecting a specific material gas into a processing vessel in order to provide specific processing to an object to be processed, said material gas being produced from metallic compound material with low vapor pressure;
• and a gas supply system for supplying said specific material gas to said gas injection means, wherein said gas supply system is characterized by comprising:
• a material reservoir tank for containing said metallic compound material therein;
• a gas passage for connecting said material reservoir tank to said gas injection means of said processing vessel;
• a first carrier gas supply means connected to said material reservoir tank for feeding a carrier gas therein;
• a material heating means provided at said material reservoir tank for heating metallic compound material inside said material reservoir tank;
• a detecting means for detecting the conditions inside said gas passage or said material reservoir tank;
• and
• a controller for a control for a value detected by said detecting means to be maintained around a specific value.