Two-dimensional aperture array for vapor deposition

A method for forming a layer on a surface in making a device, comprising,

• (a) providing a distribution member for receiving vaporized material, the distribution member having one or more walls defining a chamber wherein a polygonal two-dimensional pattern of apertures is formed in a wall, which deliver vaporized material in a molecular flow onto the surface;
• (b) providing the polygonal two-dimensional pattern of apertures to have at least four vertices, with a first set of apertures disposed at the vertices, a second set of edge apertures disposed between the apertures of the first set and defining the edges of the polygonal two-dimensional pattern, and a third set of interior apertures disposed within the periphery of the polygonal two-dimensional pattern defined by the first and second sets of apertures;
• and
• (c) dimensioning the first, second, and third set of apertures to obtain a greater flow rate per unit wall area from the first set of apertures than from the second and third set of apertures, and to obtain a greater flow rate per unit wall area from the second set of apertures than from the third set of apertures.