Device for the degassing of a disk-form substrate
OwnerBart Scholte van Mastinventor
Life of this patent
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Abstract
A device for degassing a substrate plate in an evacuated environment with two substantially flat, parallel bodies spaced at a distance smaller than their longitudinal extent forming an interspace with the substrate located between the bodies and these projecting beyond the substrate at least in the margin region, wherein in at least one of the bodies a gas delivery is disposed for generating a laminar gas flow in the interspace along the bodies and the substrate in the radial direction toward the periphery of the bodies, and that here a pumping port is provided for pumping off the gas flow.
Claims18
Device for degassing a plate-form substrate (10) in an evacuated environment with two substantially flat, parallel bodies (11, 12), spaced at a distance (d) smaller than their longitudinal extent (I) forming an interspace (28), with the substrate (10) located between the bodies (11, 12) and these projecting beyond the substrate at least in the margin region, characterized in that in at least one of the bodies (11,12) a gas delivery (13) is disposed for generating a laminar gas flow in the interspace (28) along the bodies (11, 12) and the substrate (10) in the radial direction toward the periphery of the bodies (11, 12) and that here a pumping port (14) is provided for pumping off the gas flow.
Method for degassing a plate-form substrate (10) in an evacuated environment with two substantially flat parallel bodies (11, 12), spaced at a distance (d) smaller than their longitudinal extent (I) forming an interspace (28), and that a flat substrate (10) is disposed between the bodies (11, 12), characterized in that in at least one of the bodies (11, 12) a gas delivery (13) is located for the generation of a laminar gas flow in the interspace (28) along the bodies (11, 12) and the substrate (10) in the radial direction toward the periphery of the bodies (11, 12), and that here the gas flow is pumped off through a pumping port (14).
Dependencies are inferred from the claim text.