Laser processing apparatus and laser processing method as well as debris extraction mechanism and debris extraction method

A laser processing method of performing pattern processing of a transparent conductive film that is formed on a multilayer film on a substrate by using laser light, comprising:

• generating a vortex flow by directing gas into the vicinity of a laser-irradiated portion of said transparent conductive film using a debris extraction module having a vortex generation mechanism disposed in proximity to said substrate and
• extracting laser irradiation generated debris prior to deposition and after deposition on said substrate, by entrapping said debris into said vortex flow to be extracted to the outside with said gas.

A debris extraction mechanism for removing debris generated by laser irradiation when performing pattern processing of a transparent conductive film that is formed on a multilayer film on a substrate by using laser light, comprising:

• a vortex generation portion for generating a vortex flow by flowing gas into the vicinity of a laser-irradiated portion of said transparent conductive film,
• wherein debris deposited on said substrate and suspended debris is entrapped into said vortex flow by said vortex generation portion disposed in proximity to said substrate to be extracted to the outside with said gas.

A debris extraction method of removing debris generated by laser irradiation when performing pattern processing of a transparent conductive film that is formed on a multilayer film on a substrate by using laser light, comprising:

• generating a vortex flow by directing gas into the vicinity of a laser-irradiated portion of said transparent conductive film using a vortex generation portion disposed in proximity to said substrate and
• extracting debris deposited on said substrate and suspended debris by entrapping said debris into said vortex flow to be extracted to the outside with said gas.

A laser processing apparatus for performing pattern processing of a transparent conductive film that is formed on a multilayer film on a substrate by using laser light, comprising:

• a debris extraction module having a vortex generation mechanism that generates a vortex flow by directing gas into the vicinity of a laser-irradiated portion of said transparent conductive film,
• wherein said debris extraction module is disposed in proximity to said substrate, and debris deposited on said substrate and suspended debris is entrapped into said vortex flow to be extracted to the outside with said gas.