Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters

An actuator for varying a capacitance of an electronic circuit, comprising:

• a moveable membrane, wherein movement of the membrane varies the capacitance of the electronic circuit;
• and
• a rod connected with the membrane,
• wherein:
• the movement of the membrane is obtained by varying the distance of the rod from the electric circuit;
• the membrane has a static condition and a dynamic condition;
• and
• a distance between the membrane and the electronic circuit during the dynamic condition of the membrane can either be greater or shorter than a distance between the membrane and the electronic circuit during static condition of the membrane.

A membrane actuator for tuning an electronic circuit, comprising:

• a first substrate;
• a first conductive material disposed on the first substrate and containing the electronic circuit, the first substrate and the first conductive material forming a first layer;
• a deformable membrane;
• a second conductive material connected with the flexible membrane, the flexible membrane and the second conductive material forming a second layer, the flexible membrane and the second conductive material being located at a distance from the first substrate and the first conductive material;
• a second substrate;
• a third conductive material connected with the second substrate, the second substrate and third conductive material forming a third layer;
• and
• a magnetic element attached to the membrane,
• wherein, upon application of a bias voltage to the magnetic element, a magnetic force is produced, causing the membrane to deform, thereby varying the distance of the second conductive material from the electronic circuit and tuning the electronic circuit.

An actuator for tuning an electronic circuit, comprising:

• a first substrate;
• a first cavity located in the first substrate;
• a first electrically conductive arrangement disposed in the first cavity, the first electrically conductive arrangement comprising the electronic circuit;
• a second substrate;
• a second cavity located in the second substrate;
• a second electrically conductive arrangement disposed in the second cavity;
• a flexible membrane located between the first substrate and the second substrate;
• and
• a third electrically conductive arrangement contacting the flexible membrane, wherein tuning of the electronic circuit is obtained by movement of the flexible membrane.