Method and device for checking lithography data
AssigneeMicron Technology, Inc.
InventorsHusayn Alvarez-Gomariz, John Futrell
Life of this patent
Estimating the term…
Abstract
Devices and methods are provided that include advantages such as the ability to identify sizes, shapes and locations of frequently unwanted additional features that occur as a result of photolithographic interference. The additional feature information is obtained through use of simulation methods with reduced processing time or solving a system of equations. This allows a user to quickly find information about additional feature printing before the features are printed, and before the reticle is made.
Claims20
A method of solving a system of equations, comprising:
- representing each of a number of equations in the system as a graphical area wherein a numerical coordinate solution to each of the equations falls within the respective graphical area;
- identification of at least one intersecting region where the graphical areas overlap;
- and
- selecting a point within at least one of the intersecting regions that represents a solution to the system of equations.
A machine readable medium with instructions stored thereon, the instructions when executed, operable to cause:
- graphic representation of a number of equations in a system of equations, wherein a numerical coordinate solution to each of the equations falls within a respective graphical area associated with each equation;
- identification of at least one intersecting region where two or more graphical areas overlap;
- and
- selection of a solution within the intersecting region that represents a solution to the system of equations.
A method of solving a system of equations, comprising:
- representing each of a number of equations in the system as a two dimensional collection of pixels wherein all individual equation solutions are included within the collection of pixels;
- identification of at least one intersecting region between two or more collections of pixels that overlap in two dimensions;
- and
- selecting one pixel from within at least one intersecting region that represents a solution to multiple equations within the system of equations.
A method of solving a system of equations, comprising:
- plotting a solution to each individual equation, with an additional two dimensional area surrounding the plotted solution by an adjusted amount to form a graphical area;
- identification of at least one intersecting region where the graphical areas overlap;
- and
- selecting a more specific solution determined by at least one of the intersecting regions that represents a solution to the system of equations.
Dependencies are inferred from the claim text.