Enhanced multi-component oxide-containing sputter target alloy compositions
AssigneeHeraeus, Inc.
InventorsMichael Racine, Anirban Das, Steven Kennedy, Yuanda Cheng
Life of this patent
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Abstract
A magnetic recording medium, including a substrate, and a data-storing thin film layer formed over the substrate. The data-storing thin film layer is comprised of cobalt (Co), platinum (Pt), and a multi-component oxide. The multi-component oxide has cations with a reduction potential of less than −0.03 electron volts, and atomic radii of less than 0.25 nanometers. Additionally, the multi-component oxide is diamagnetic, paramagnetic, or magnetic with a permeability of less than 10−6 m3/kg. The multi-component oxide has a dielectric constant greater than 5.0. The sputter target is further comprised of chromium (Cr) and/or boron (B).
Claims35
A sputter target, wherein said sputter target is comprised of cobalt (Co), platinum (Pt), and a multi-component oxide,
- wherein the multi-component oxide has cations with a reduction potential of less than −0.03 electron volts, and atomic radii of less than 0.25 nanometers, and
- wherein the multi-component oxide is diamagnetic, paramagnetic, or magnetic with a permeability of less than 10−6 m3/kg.
A magnetic recording medium comprising:
- a substrate;
- and
- a data-storing thin film layer formed over said substrate,
- wherein said data-storing thin film layer is comprised of cobalt (Co), platinum (Pt), and a multi-component oxide,
- wherein the multi-component oxide has cations with a reduction potential of less than −0.03 electron volts, and atomic radii of less than 0.25 nanometers, and
- wherein the multi-component oxide is diamagnetic, paramagnetic, or magnetic with a permeability of less than 10−6 m3/kg.
A method for manufacturing a magnetic recording medium, comprising the step of sputtering at least a first data-storing thin film layer over a substrate from a sputter target, wherein the sputter target is comprised of cobalt (Co), platinum (Pt), and a multi-component oxide, wherein the multi-component oxide has cations with a reduction potential of less than −0.03 electron volts, and atomic radii of less than 0.25 nanometers, and wherein the multi-component oxide is diamagnetic, paramagnetic, or magnetic with a permeability of less than 10−6 m3/kg.
A sputter target, wherein said sputter target is comprised of cobalt (Co), platinum (Pt), at least one oxide, and at least one metal,
- wherein, when the sputter target is sputtered, said at least one oxide and said at least one metal render a multi-component oxide, wherein the multi-component oxide has cations with a reduction potential of less than −0.03 electron volts, and atomic radii of less than 0.25 nanometers, wherein the multi-component oxide is diamagnetic, paramagnetic, or magnetic with a permeability of less than 10−6 m3/kg, and wherein the multi-component oxide has a dielectric constant greater than 5.0.
A sputter target, wherein said sputter target is comprised of cobalt (Co), platinum (Pt), and at least first and second oxides,
- wherein, when the sputter target is sputtered, said first and second oxides render a multi-component oxide, wherein the multi-component oxide has cations with a reduction potential of less than −0.03 electron volts, and atomic radii of less than 0.25 nanometers, wherein the multi-component oxide is diamagnetic, paramagnetic, or magnetic with a permeability of less than 10−6 m3/kg, and wherein the multi-component oxide has a dielectric constant greater than 5.0.
A sputter target, wherein said sputter target is comprised of cobalt (Co), platinum (Pt), and at least first and second metals,
- wherein, when the sputter target is reactively sputtered, said first and second metals render a multi-component oxide, wherein the multi-component oxide has cations with a reduction potential of less than −0.03 electron volts, and atomic radii of less than 0.25 nanometers, wherein the multi-component oxide is diamagnetic, paramagnetic, or magnetic with a permeability of less than 10−6 m3/kg, and wherein the multi-component oxide has a dielectric constant greater than 5.0.
A method for manufacturing a magnetic recording medium, comprising the step of sputtering at least a first data-storing thin film layer over a substrate from a sputter target, wherein the sputter target is comprised of cobalt (Co), platinum (Pt), at least one oxide, and at least one metal, wherein said at least one oxide and said at least one metal render a multi-component oxide, wherein the multi-component oxide has cations with a reduction potential of less than −0.03 electron volts, and atomic radii of less than 0.25 nanometers, and wherein the multi-component oxide is diamagnetic, paramagnetic, or magnetic with a permeability of less than 10−6 m3/kg.
A method for manufacturing a magnetic recording medium, comprising the step of sputtering at least a first data-storing thin film layer over a substrate from a sputter target, wherein the sputter target is comprised of cobalt (Co), platinum (Pt), and at least a first and a second oxide, wherein said at least a first and second oxide render a multi-component oxide, wherein the multi-component oxide has cations with a reduction potential of less than −0.03 electron volts, and atomic radii of less than 0.25 nanometers, and wherein the multi-component oxide is diamagnetic, paramagnetic, or magnetic with a permeability of less than 10−6 m3/kg.
A method for manufacturing a magnetic recording medium, comprising the step of reactively sputtering at least a first data-storing thin film layer over a substrate from a sputter target in the presence of oxygen (O), wherein the sputter target is comprised of cobalt (Co), platinum (Pt), and at least a first and a second metal, wherein said at least a first and second metals render a multi-component oxide, wherein the multi-component oxide has cations with a reduction potential of less than −0.03 electron volts, and atomic radii of less than 0.25 nanometers, and wherein the multi-component oxide is diamagnetic, paramagnetic, or magnetic with a permeability of less than 10−6 m3/kg.
Dependencies are inferred from the claim text.