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US 2006/0233968 A1Published application
System and method for vaporizing a metal
OwnerTihiro Ohkawa, Karl Umstadterinventors
Life of this patent
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Abstract
A laser device for vaporizing a metal requires a source for generating a laser beam having a predetermined power density at a point on the laser beam. A solid metal target material is then moved along a path, and through the point, relative to the laser beam. This is done to sequentially transition the target material from a solid to a liquid, and from a liquid to a vapor. In this process there is minimal liquid ejection.
Claims20
A device for vaporizing a metal, which comprises:
- a laser source for generating a laser beam, wherein the laser beam has a predetermined power density over an area (πa2) at a point on the laser beam;
- a solid metal target material;
- and
- a mechanical means for moving the target material relative to the laser beam at a velocity “u” along a path and through the area (πa2) at the point on the laser beam to sequentially transition the target material from a solid to a liquid, and from a liquid to a vapor as the target material passes through the area, wherein the liquid target material is maintained at a substantially constant depth “d” while satisfying the condition d<Mnsu2a/pv, wherein M is the mass of an atom of target material, ns is the number density of the target material and pv is the vapor pressure of the vapor.
1 more element
A device for vaporizing a metal, which comprises:
- a solid metal target material having a substantially flat surface;
- a means for directing a laser beam onto an area (πa2) at a point on the surface of the metal target material with a predetermined power density, to sequentially transition the target material in the area (πa2) from a solid to a liquid, and from a liquid to a vapor;
- and
- a means for moving the metal target material relative to the laser beam at a velocity “u” to maintain the liquid target material at a substantially constant depth “d” within the area while satisfying the condition d<Mnsu2a/pv, wherein M is the mass of an atom of target material, ns is the number density of the target material and pv is the vapor pressure of the vapor.
1 more element
A method for vaporizing a solid metal target material, which comprises the steps of:
- generating a laser beam, wherein the laser beam has a predetermined power density over an area (πa2) at a point on the laser beam;
- and
- moving the target material relative to the laser beam along a path and through the area (πa2) at the point on the laser beam at a velocity “u” to sequentially transition the target material from a solid to a liquid, and from a liquid to a vapor as the target material passes through the area, wherein the liquid target material is maintained at a substantially constant depth “d” along the path while satisfying the condition d<Mnsu2a/pv, wherein M is the mass of an atom of target material, ns is the number density of the target material and pv is the vapor pressure of the vapor.
Dependencies are inferred from the claim text.