System and method for controlling a stage assembly
AssigneeNikon Corporation
InventorMichael Binnard
Life of this patent
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AssigneeNikon Corporation
InventorMichael Binnard
Estimating the term…
A stage assembly (220) that moves a work piece (200) a movement step (257) includes a first stage (238), a first mover assembly (242), a second stage (240), and a second mover assembly (244). The first mover assembly (242) moves the first stage (238) with a first acceleration profile (366) during the movement step (257) and the second mover assembly (244) moves the second stage (240) with a second acceleration profile (368) during the movement step (257) that is different than the first acceleration profile. For example, the second mover assembly (244) moves the second stage (240) during the movement step (257) with a higher maximum acceleration than the first mover assembly (242) moves the first stage (238) during the movement step (257). Further, the second mover assembly (244) moves the second stage (240) during the movement step (257) with a higher average acceleration than the first mover assembly (242) moves the first stage (238) during the movement step (257).
A stage assembly that moves a work piece a movement step along a first axis, the stage assembly comprising:
A stage assembly that moves a work piece a movement step along a first axis, the stage assembly comprising:
A method for moving a work piece a movement step, the method comprising the steps of:
Dependencies are inferred from the claim text.