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AssigneeJapan Science and Technology Agency
InventorHideki Kawakatsu
Estimating the term…
A cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers. The cantilever array includes a large number of compliant cantilevers sliding on a surface of a sample.
A scanning probe microscope, wherein, by using a heterodyne laser Doppler meter, the diameter of a laser spot is made smaller and a signal intensity is made higher as a vibration frequency becomes higher so as to detect a vibration having a high S/N ratio of a cantilever having a high natural frequency.
A sensor wherein, by using a heterodyne laser Doppler meter, the diameter of a laser spot is made smaller and a signal intensity is made higher as a vibration frequency becomes higher so as to detect a vibration having a high S/N ratio of a cantilever having a high natural frequency.
An optical-fiber homodyne laser interferometer, comprising a fine-cantilever-detecting optical system for positioning a small laser spot having a small laser spot diameter at a fine cantilever and for detecting a vibration having a high natural frequency and a high S/N ratio.
A laser Doppler interferometer including an optically exciting function for exciting a measuring object, comprising an optically exciting unit;
Dependencies are inferred from the claim text.