System and method for surface treatment
OwnerDouglas Rebinsky, Michael Johnsoninventors
Life of this patent
Estimating the term…
Abstract
A surface treatment system may include a microwave chamber and an insulating cavity located within the microwave chamber. The insulating cavity may be configured to receive an object. The system also may include a supply of solvent gas in selective fluid communication with the insulating cavity and a magnetron configured to emit microwave radiation. The system may further include a waveguide operatively connected to the microwave chamber and the magnetron. The waveguide may be configured to direct microwave radiation into the insulating cavity to form a solvent gas plasma from the solvent gas. The solvent gas plasma may be configured to dissolve surface contamination on the object.
Claims20
A surface treatment system, comprising:
- a microwave chamber;
- an insulating cavity located within the microwave chamber and configured to receive an object;
- a supply of solvent gas in selective fluid communication with the insulating cavity;
- a magnetron configured to emit microwave radiation;
- and
- a waveguide operatively connected to the microwave chamber and the magnetron and configured to direct the microwave radiation into the insulating cavity to form a solvent gas plasma from the solvent gas, the solvent gas plasma being configured to dissolve surface contamination on the object.
A surface treatment system, comprising:
- a microwave chamber configured to receive an object;
- a plasma chamber operatively connected to the microwave chamber;
- a supply of solvent gas in selective fluid communication with the plasma chamber;
- a magnetron configured to emit microwave radiation;
- a waveguide operatively connected to the magnetron and configured to direct the microwave radiation into the plasma chamber to form a solvent gas plasma within the plasma chamber, the solvent gas plasma configured to dissolve surface contamination on the object;
- and
- a movable nozzle device in fluid communication with the microwave chamber, the movable nozzle device being configured to direct the solvent gas plasma from the plasma chamber into the microwave chamber toward the object.
A method of surface treating, comprising:
- supplying a solvent gas in a region adjacent to a surface of an object;
- and
- directing microwave radiation into the solvent gas to excite the solvent gas to form a solvent gas plasma, the solvent gas plasma being configured to dissolve surface contamination on the object.
A method of surface treating, comprising:
- placing an object within a microwave chamber;
- supplying a solvent gas in a plasma chamber;
- directing microwave radiation into the plasma chamber to excite the solvent gas to form a solvent gas plasma;
- and
- directing the solvent gas plasma from the plasma chamber toward a surface of the object within the microwave chamber, the solvent gas plasma being configured to dissolve surface contamination on the object.
Dependencies are inferred from the claim text.