Back to results
US 2006/0231018 A1Published application
Coating device and deposition device
AssigneeSeiko Epson Corporation
InventorTakeshi Kijima
Life of this patent
Estimating the term…
Abstract
A coating device including a mounting section which supports a workpiece (substrate) W, a supporting section which rotatably supports the mounting section, and a plurality of spray nozzles which spray a coating liquid on the mounting section.
Claims11
A coating device comprising:
- a mounting section which supports a workpiece;
- a supporting section which rotates and supports the mounting section;
- and
- a plurality of spray nozzles which spray a coating liquid on the mounting section.
1 more element
Dependencies are inferred from the claim text.