Method for managing the storage of semiconductor material

An article of manufacture including program code which, when executed by a machine, causes the machine to perform a method, the method comprising:

• processing a plurality of semiconductor substrates with a first type of semiconductor substrate processing tool to create a plurality of a first type of semiconductor substrate;
• determining the contents of a plurality of storage devices, each storage device being connected to a second type of semiconductor substrate processing tool;
• and
• selecting a maximum number of the first type of semiconductor substrate to be stored in each storage device, the maximum number being less than a storage capacity of the respective storage device.

A computing system comprising instructions disposed on a computer readable medium, said instructions capable of being executed by said computing system to perform a method, said method comprising:

• processing a plurality of semiconductor substrates with a first type of semiconductor substrate processing tool to create a plurality of a first type of semiconductor substrate;
• determining the contents of a plurality of storage devices, each storage device being connected to a second type of semiconductor substrate processing tool;
• and
• selecting a maximum number of the first type of semiconductor substrate to be stored in each storage device, the maximum number being less than a storage capacity of the respective storage device.