Substrate processing apparatus, history information recording method, history information recording program, and history information recording system

A history information recording method performed in a substrate processing apparatus including a plurality of process chambers for processing a substrate and a transfer part for carrying in and carrying out the substrate to and from the plurality of process chambers, said history information recording method comprising the steps of:

• relating history information concerning a transfer of the substrate by the transfer part to each substrate, and recording the history information concerning the transfer of the substrate as first history information;
• relating history information concerning a process state of the substrate in each of the plurality of process chambers to each substrate subject to be processed, and recording the history information concerning the process state as second history information;
• and
• relating history information concerning an alarm occurred in at least one of the transfer part and the process chambers to each substrate, and recording the history information concerning the alarm as third history information.

A history information recording program causing a substrate processing apparatus to record history information, substrate processing apparatus including a plurality of process chambers for processing a substrate and a transfer part for carrying in and carrying out the substrate to and from the plurality of process chambers, said history information recording program comprising the codes for:

• relating history information concerning a transfer of the substrate by the transfer part to each substrate, and recording the history information concerning the transfer of the substrate as first history information;
• relating history information concerning a process state of the substrate in each of the plurality of process chambers to each substrate subject to be processed, and recording the history information concerning the process state as second history information;
• and
• relating history information concerning an alarm occurred in at least one of the transfer part and the process chambers to each substrate, and recording the history information concerning the alarm as third history information.

A history information recording system including a sub-control unit for controlling a plurality of process chambers for processing a substrate and a transfer part for carrying in and carrying out the substrate to and from the plurality of process chambers, and a main control unit for controlling a substrate processing apparatus provided with the plurality of process chambers and the transfer part through the sub-control part, wherein:

• wherein the main control unit comprises:
• a transfer history recording part relating history information concerning a transfer of the substrate by the transfer part to each substrate, and recording the history information concerning the transfer of the substrate as first history information;
• a process history recording part relating history information concerning a process state of the substrate in each of the plurality of process chambers to each substrate subject to be processed, and recording the history information concerning the process state as second history information;
• and
• an alarm history recording part relating history information concerning an alarm occurred in at least one of the transfer part and the process chambers to each substrate, and recording the history information concerning the alarm as third history information.