Apparatus and method for heating substrates
AssigneeApplied Materials, Inc.
InventorsJun Zhao, David Quach, Timothy Weidman, Rick Roberts, Farhad Moghadam, Dan Maydan
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Abstract
An apparatus for processing substrates is disclosed. In one embodiment, the apparatus includes a housing and a plurality of stacked cell structures in the housing. An actuator is adapted to move the plurality of stacked cell structures inside of the housing while substrates in the stacked cell structures are being heated.
Claims20
-24. (canceled)
A method for processing substrates in an apparatus having a plurality of stacked cell structures, each cell structure being adapted to contain a substrate, the method comprising:
- a) inserting a first substrate within a first cell structure;
- b) heating the first substrate in the first cell structure;
- c) moving the plurality of stacked cell structures;
- d) inserting a second substrate within the second cell structure;
- and
- e) heating the second substrate in the second cell structure.
A method for processing a substrate, the method comprising:
- a) inserting a substrate in a cell structure comprising a first gas permeable element and a second gas permeable element facing the first gas permeable element;
- and
- b) heating the substrate while the substrate is spaced from the first gas permeable element and the second gas permeable element.
-47. (canceled)
A method for processing substrates in an apparatus having a plurality of stacked cell structures, each cell structure being adapted to contain a substrate, the method comprising:
- a) inserting a first substrate and a first sol gel layer on the first substrate in a first cell structure;
- b) heating the first substrate and the first sol gel layer in the first cell structure to form a first mesoporous oxide layer from the first sol gel layer;
- c) moving the plurality of stacked cell structures;
- d) inserting a second substrate and a second sol gel layer on the second substrate within the second cell structure;
- and
- e) heating the second substrate and the second sol gel layer in the second cell structure to form a second mesoporous oxide layer from the second sol gel layer.
Dependencies are inferred from the claim text.