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US 2006/0222869 A1Published application
Electropen lithography
OwnerYuguang Cai, Benjamin Ockoinventors
Life of this patent
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Abstract
The present invention relates to methods for producing a patterned surface having nanoscale features. The present invention more particularly relates to tip-induced nanoelectrochemical oxidation methods for nanoscale patterning. The invention also relates to the nanoscale patterns produced thereby.
Claims73
A method for producing a nanoscale patterned surface, the method comprising:
- providing an ultrafine tip having a first group of patterning molecules provided thereon;
- providing a substrate surface having oxidizable groups accessible to said ultrafine tip;
- contacting said ultrafine tip with a selected portion of said substrate surface;
- positioning said ultrafine tip to be sufficiently proximal to said substrate surface in the presence of a liquid transporting medium to form a meniscus between said ultrafine tip and said substrate surface;
- applying to the ultrafine tip a negative voltage capable of oxidizing said oxidizable groups to an oxidized form;
- whereby said substrate surface and said ultrafine tip are at least partially electrically conductive;
- and said first group of patterning molecules are capable of being hydrolyzed by, and/or capable of reacting with, said oxidized form, thereby producing a nanoscale surface patterned with said first group of patterning molecules.
4 more elements
A method for producing a nanoscale patterned surface, the method comprising:
- providing an ultrafine tip having a first group of siloxane patterning molecules provided thereon;
- providing a silicon oxide surface at least partially covered with siloxane molecules terminated with methyl, vinyl, acetylenyl, or mercapto groups, or a combination thereof;
- contacting said ultrafine tip with a selected portion of said silicon oxide surface;
- positioning said ultrafine tip to be sufficiently proximal to said silicon oxide surface in the presence of a liquid transporting medium to form a meniscus between said ultrafine tip and said silicon oxide surface;
- applying to the ultrafine tip a negative voltage capable of oxidizing said methyl, vinyl, acetylenyl, or mercapto groups to an oxidized form;
- whereby said silicon oxide surface and said ultrafine tip are at least partially electrically conductive;
- and said first group of siloxane patterning molecules are capable of being hydrolyzed by, and/or capable of reacting with, said oxidized form, thereby producing a nanoscale surface patterned with said first group of siloxane patterning molecules.
4 more elements
A nanoscale patterned surface produced by a method comprising:
- providing an ultrafine tip having a first group of patterning molecules provided thereon;
- providing a substrate surface having oxidizable groups accessible to said ultrafine tip;
- contacting said ultrafine tip with a selected portion of said substrate surface;
- positioning said ultrafine tip to be sufficiently proximal to said substrate surface in the presence of a liquid transporting medium to form a meniscus between said ultrafine tip and said substrate surface;
- applying to the ultrafine tip a negative voltage capable of oxidizing said oxidizable groups to an oxidized form;
- whereby said substrate surface and said ultrafine tip are at least partially electrically conductive;
- and said first group of patterning molecules are capable of being hydrolyzed by, and/or capable of reacting with, said oxidized form.
4 more elements
A silicon oxide nanoscale patterned surface produced by a method comprising
- providing an ultrafine tip having a first group of siloxane patterning molecules provided thereon;
- providing a silicon oxide surface at least partially covered with siloxane molecules terminated with methyl, vinyl, acetylenyl, or mercapto groups, or a combination thereof;
- contacting said ultrafine tip with a selected portion of said silicon oxide surface;
- positioning said ultrafine tip to be sufficiently proximal to said silicon oxide surface in the presence of a liquid transporting medium to form a meniscus between said ultrafine tip and said silicon oxide surface;
- applying to the ultrafine tip a negative voltage capable of oxidizing said methyl, vinyl, acetylenyl, or mercapto groups to an oxidized form;
- whereby said silicon oxide surface and said ultrafine tip are at least partially electrically conductive;
- and said first group of siloxane patterning molecules are capable of being hydrolyzed by, and/or capable of reacting with, said oxidized form.
4 more elements
Dependencies are inferred from the claim text.