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AssigneeNachi-Fujikoshi Corp.
InventorsHideki Sato, Kazuo Kitajima, Masaru Sonobe, Norihiro Kato, Manabu Yasuoka
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A production device and a method produce a multicomponent film containing metal components such as TiAlN having greatly different melting points by a melting-evaporation type ion plating method which has high material use efficiency and provides a good film quality. For this end, electric power required to evaporate material (4) is first supplied and then electric power stepwise increased from the first electric power is repeatedly supplied until a required maximum electric power is reached. At the same time, plasma control is performed for converging plasma (7) into an initial area required to evaporate the material and then plasma control is performed for successively and stepwise moving and expanding the plasma from the initial plasma area up to a maximum plasma area to gradually melt a non-melted portion of the material.
A production device for producing a multicomponent film from a vaporizing material (4) of an alloy containing at least two sorts of metals or intermetallics compound by a melting-evaporation type ion plating method which melts and evaporates the material from a single crucible or hearth (3) with use of plasma (7) converged by an electric field or a magnetic field, the device having an electric power supply unit (6) for melting and evaporating the material and a plasma control unit (9). for controlling the electric field or magnetic field, characterized in that
A method for producing a multicomponent film by using a vaporizing material (4) of an alloy containing at least two sorts of metals or intermetallics compound and by melting and evaporating the material from a single crucible or hearth (3) with use of plasma (7) converged by an electric field or a magnetic field, characterized by
Dependencies are inferred from the claim text.