Micro gripper and method for manufacturing the same
AssigneeKorea Electronics Technology Institute
InventorsKyu Shin, Joon Park, Kwang Park, Chan Moon
Life of this patent
Estimating the term…
Abstract
A micro gripper and a method for manufacturing the same are disclosed. The manufacturing method of the micro gripper supplies a fluid to a penetration hole of a gripper jaw, and discharges the fluid from opposite surfaces of the first and second structures of the micro gripper, thereby completely detaching the object attached on the opposite surfaces of the first and second structures by electrostatic force and removing the stiction. Furthermore, the present invention can grip the object more strongly by sucking the fluid from the penetration hole of the gripper jaw, when the first and second structures of the gripper jaw grip the object.
Claims10
A micro gripper, comprising:
- a gripper jaw composed of first and second substrates each oppositely spaced a predetermined distance (d1) apart, in which a penetration hole that enables fluid to flow inside the respective structures is respectively formed, and the penetration hole is respectively exposed on opposite surfaces of the first and second structure;
- a force transmission part, connected to the first and second structures of the gripper jaw, configured to transmit a force, so as to enable the first and second structures of the gripper jaw to grip an object by narrowing the distance (d1) there between;
- an actuator configured to provide a force to the force transmission part;
- and
- a fluid supply and suction unit configured to supply the fluid to the penetration hole of the gripper jaw so as to detach the object attached to opposite surfaces of the first and second structures, or suck the fluid from the penetration hole of the gripper jaw so as to enable the first and second structure to strongly grip the object.
A method for manufacturing a micro gripper, comprising:
- depositing a seed layer on an upper surface of a substrate;
- forming a pair of metal islands each spaced a predetermined distance apart on an upper surface of the seed layer;
- forming a photoresist layer on an central upper surface of a pair of first metal islands, respectively;
- depositing a metal while surrounding the pair of metal islands, including the photoresist layer;
- forming a gripper jaw, which is composed of first and second structures each spaced a predetermined distance apart, on the upper surface of the seed layer, in which first and second structures made of metal forms a penetration hole by removing the photoresist layer;
- and
- separating the gripper jaw from the substrate and the seed layer.
A method for manufacturing a micro gripper, comprising:
- forming first to fifth grooves each spaced a predetermined distance apart on an upper surface of a first substrate;
- bonding a second substrate to the upper surface of the first substrate on which the first to fifth grooves are formed;
- and
- forming a gripper jaw composed of a first and second structures each spaced a predetermined distance apart, in which a penetration hole is formed inside of the first and second substrate bonded by removing the first and second substrates corresponding to the first, third and fifth grooves.
Dependencies are inferred from the claim text.