Apparatus for use in thinning a semiconductor workpiece

A chuck for receiving and supporting a semiconductor workpiece with a device side, a bevel and a back side, the chuck comprising:

• a body having a semiconductor workpiece support surface;
• a retainer having an inner most portion removeably attached to the body and adapted to cover a peripheral portion of back side of the workpiece;
• a first sealing member forming an inner most portion of the retainer, the first sealing member providing a seal between the retainer and the back side of the workpiece;
• and
• a second sealing member providing a seal between the retainer and the body.

A chuck for supporting a workpiece having a device side, a bevel and a back side and preventing a process fluid from contacting the device side, bevel and a peripheral portion of the backside of the workpiece during a thinning process, the chuck comprising:

• a body having a recess and a surface for supporting the workpiece;
• a retaining ring having:
• an engagement member configured to cooperate with the recess in the body and removeably attach the retaining ring to the body such that the retaining ring covers the bevel and the peripheral portion of the back side of the workpiece;
• and
• an annular cavity with a compressible member disposed therein for forming a seal between the retaining ring and the workpiece, the seal being unobstructed from the process fluid during the thinning process.

An apparatus for use in supporting a semiconductor workpiece having a device side, a bevel and a back side during a process of thinning the workpiece, the apparatus comprising:

• a body having an outer periphery and an inner surface for supporting the workpiece;
• a retaining ring having a first compressible member for forming a seal between the retainer and the back side of the workpiece;
• means for removeably attaching the retaining ring to the body such that the retaining ring protects the bevel and a peripheral portion of the back side of the workpiece during the thinning process;
• and
• a second compressible member for forming a seal between the retainer and the outer periphery of the body.