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US 2006/0219591 A1Published application
Wafer pod with working sheet holder
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorChia-Cheng Lin
Life of this patent
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Abstract
A wafer pod. The wafer pod comprises a main body, a working sheet holder disposed on the main body, and a lock disposed between the working sheet holder and the main body. The working sheet holder is fixed to the main body by the lock to form an accommodating space.
Claims18
A wafer pod, comprising:
- a main body;
- a working sheet holder disposed on the main body;
- and
- a lock disposed between the working sheet holder and the main body, whereby the working sheet holder is fixed to the main body and forms an accommodating space therebetween.
1 more element
Dependencies are inferred from the claim text.