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US 2006/0219565 A1Published application
Technique for electrochemically depositing an alloy having a chemical order
AssigneeAdvanced Micro Devices, Inc.
InventorsAxel Preusse, Gerd Marxsen
Life of this patent
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Abstract
By providing two or more consumable electrodes within a single reactor vessel, an alloy having a high degree of chemical ordering may be deposited in situ in that the current flows of the individual consumable electrodes are controlled to obtain a substantially layered deposition of the two or more metals. Hence, especially in copper-based metallization layers, the advantage of enhanced resistance against electromigration offered by alloys may be achieved without unduly reducing the overall conductivity.
Claims22
A method, comprising:
- contacting a surface to be plated with an electrolyte, said electrolyte being in contact with a first consumable electrode comprised of a first metal and a second consumable electrode comprised of a second metal other than said first metal;
- establishing a first current flow between said first consumable electrode and said surface via said electrolyte;
- and
- establishing a second current flow between said second consumable electrode and said surface via said electrolyte.
1 more element
A method, comprising:
- electrochemically depositing a first layer of a first metal and a second layer of a second metal above an insulating layer having formed therein trenches of a metallization layer of a semiconductor device, said first and second metal layer being deposited in situ using a single electrolyte solution.
A deposition tool, comprising:
- a reactor vessel configured to contain a specified electrolyte;
- a first consumable electrode comprised of a first metal, said first consumable electrode located within said reactor vessel;
- a second consumable electrode comprised of a second metal, said second consumable electrode located within said reactor vessel so as to be electrically insulated from said first consumable electrode;
- a first current source electrically connected to said first consumable electrode;
- and
- a second current source electrically connected to said second consumable electrode.
3 more elements
Dependencies are inferred from the claim text.