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US 2006/0219435 A1Published application
Modifying the electro-mechanical behavior of devices
AssigneeIdc, LLC
InventorsManish Kothari, Clarence Chui, Lauren Palmateer
Life of this patent
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Abstract
A MEMS device is packaged with a control material that is included in the package to affect an operation of a moveable element of the device. The control material may affect operational characteristics including actuation and release voltages and currents, mechanical affects including damping and stiffness, lifetime of the device, optical properties, thermal affects and corrosion. The control material may be inserted into the package as part of any of several structural components of the package or the MEMS device.
Claims33
A display device, comprising:
- a package;
- at least one microelectromechanical system (MEMS) device enclosed within the package, the MEMS device comprising a movable element configured to contact another surface;
- and
- an environmental control material inside the package, wherein the amount of the environmental control material is selected to affect an operation of the MEMS device.
1 more element
A method of packaging a display device, comprising:
- forming at least one interferometric modulator on a substrate, the interferormetric modulator comprising a movable surface configured to contact another surface;
- and
- including an environmental control material, wherein the amount of environmental control material is selected based upon an effect on an operation of the interferometric modulator caused by the material.
Dependencies are inferred from the claim text.