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US 2006/0219362 A1Published application
Gas injector and apparatus including the same
AssigneeJusung Engineering Co., Ltd.
InventorsGeun-Jo Han, Jeong-Beom Lee, Bu-Jin Ko
Life of this patent
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Abstract
A gas injector includes: a plate including at least one first injection hole; and at least one nozzle module combined with the plate, the at least one nozzle module including at least one second injection hole connected to the at least one first injection hole.
Claims20
A gas injector, comprising:
- a plate including at least one first injection hole;
- and
- at least one nozzle module combined with the plate, the at least one nozzle module including at least one second injection hole connected to the at least one first injection hole.
An apparatus for a display device, comprising:
- a chamber;
- a susceptor in the chamber;
- and
- a gas injector over the susceptor, the gas injector comprising:
- a plate including at least one first injection hole;
- and
- at least one nozzle module combined with the plate, the at least one nozzle module including at least one second injection hole connected to the at least one first injection hole.
4 more elements
Dependencies are inferred from the claim text.