Cleaning device and cleaning method

A cleaning method comprising:

• a target object carrying step for carrying a target object into a cleaning bath, and mounting the target object to the cleaning bath with a front face thereof exposed into the cleaning bath and a rear face thereof exposed to the outside of the cleaning bath respectively while providing a clearance between the target object and the cleaning bath;
• and
• a cleaning/rinsing step for flowing the cleaning fluid in the cleaning bath, thereby cleaning or rinsing the front face of the target object that comes into contact with the cleaning fluid by the cleaning fluid, and cleaning or rinsing a rear face of the target object by the cleaning fluid flowing through the clearance by the action of the pressure of the cleaning fluid in the cleaning bath.

A cleaning device for cleaning or rinsing a target object disposed in a cleaning bath by cleaning fluid in the cleaning bath comprising:

• one side wall that configures the cleaning bath by being in abutment with a device body and is formed with an opening corresponding to a contour of the target object;
• a holding unit being capable of holding a rear face of the target object carried into the inner side of the one side wall through the opening from the outside of the one side wall and holding the target object in a vertically upright position;
• characterized in that the holding unit hold the rear face of the target object in a non-contact state by the action of a negative pressure generated by a whirling flow.

A cleaning device for cleaning a target object disposed in the cleaning bath by cleaning liquid in the cleaning bath comprising:

• one side wall that configures the cleaning bath by being in abutment with a device body and is formed with an opening corresponding to a contour of the target object,
• characterized in that the target object is oriented in a vertically upright position, the opening is closed by the peripheral edge of a surface opposite from a target surface being in tight contact with the circumference of the opening on the inner surface of the one side wall, and the target object is mounted to the cleaning bath with the target surface thereof exposed into the cleaning bath and the surface opposite from the target surface thereof exposed to the outside of the cleaning bath respectively.

A cleaning method comprising:

• a target object carrying step for carrying a target object into a cleaning bath and mounting the target object in the cleaning bath with a target surface thereof exposed in the cleaning bath and a surface opposite from the target surface thereof exposed to the outside of the cleaning bath;
• and
• a cleaning step for flowing the cleaning liquid in the cleaning bath and cleaning the target surface of the target object that comes in contact with the cleaning liquid.