US 2006/0219172 A1 · PVD equipment and electrode and deposition ring thereof

Abstract

A deposition ring comprises a ring body, a groove and a protrusion structure. The ring body is planar-ring shaped, and comprises a first surface. The groove and the protrusion structure are ring shaped and formed on the first surface. The protrusion structure is close to the groove and near an outer side of the ring body. The groove comprises a first side wall, a second side wall and a bottom. A curvature radius of the first side wall is larger than a curvature radius of the second side wall. The second side wall is a continuous ring shaped wall. The bottom is formed between the first side wall and the second side wall.

Claims20

Dependent claims

A deposition ring, comprising:

a ring body, which is planar-ring shaped, comprising a first surface;
and
a groove, formed on the first surface,
wherein the groove is ring shaped, near an inner side of the ring body, and a depth of the groove is between 1.2 mm and 3 mm.

1 more element

Dependencies are inferred from the claim text.

PVD equipment and electrode and deposition ring thereof

Life of this patent

PVD equipment and electrode and deposition ring thereof

Life of this patent

Abstract

Claims20