Novel Tertiary Amine Compounds Having An Ester Structure And Processes For Preparing The Same
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsTakeru Watanabe, Koji Hasegawa, Takeshi Kinsho, Jun Hatakeyama
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorsTakeru Watanabe, Koji Hasegawa, Takeshi Kinsho, Jun Hatakeyama
Estimating the term…
The present invention provides ester group-containing tertiary amine compounds of the formula (R1OCH2CH2)nN(CH2CH2CO2R2)3-n which, when used as additives in chemical amplification photolithography, can yield photoresists having a high resolution and an excellent focus margin. The present invention also provides a process comprising the step of subjecting a primary or secondary amine compound to Michael addition to an acrylic ester compound; a process comprising the steps of subjecting monoethanolamine or diethanolamine to Michael addition to an acrylic ester compound so as to form an ester group-containing amine compound and introducing a R1 group to the resultant ester group-containing amine compound; and a process comprising the step of effecting the ester exchange reaction of an ester group-containing tertiary amine with R2OH.
A process for the preparation of an ester group-containing tertiary amine compound represented by the general formula (1)
A process for the preparation of an ester group-containing tertiary amine compound represented by the general formula (1)
A process for the preparation of an ester group-containing tertiary amine compound represented by the general formula (1)
Dependencies are inferred from the claim text.