Chip-scale package for integrated circuits
AssigneeMemsic, Inc.
InventorYang Zhao
Life of this patent
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AssigneeMemsic, Inc.
InventorYang Zhao
Estimating the term…
A chip-scale packaged IC is made by bonding one or more singulated die chips (from an IC wafer) to a common substrate, such as a single cap wafer (or a portion thereof) and cutting (singulating) the substrate to yield individual, chip-scale packaged ICs. Alternatively, each die chip is bonded to an individual, pre-cut cap. Electrically conductive paths extend through the cap wafer, between wafer contact pads on the surface of the cap and electrical contact points on the IC wafer. Optionally, the cap wafer contains one or more die. The IC wafer can be fabricated according to a different technology than the cap wafer, thereby forming a hybrid chip-scale packaged IC. Optionally, additional “upper-level” cap wafers (with or without die) can be stacked to form a “multi-story” IC.
A method of chip-level packaging an integrated circuit (IC) die, comprising:
A composite wafer, comprising:
A multi-story, chip-scale packaged integrated circuit, comprising:
A multi-story, chip-scale packaged integrated circuit, comprising:
Dependencies are inferred from the claim text.