Substrate, micro structure, method of making reference scale, and method of measuring length of micro structure
AssigneeSII NanoTechnology Inc.
InventorsMasanao Munekane, Junichi Tashiro
Life of this patent
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Abstract
There is provided a substrate possessing a substrate main body in whose surface there is formed a measurement object article, and a reference scale having been provided, on the surface of the substrate main body, in the vicinity of a region where the measurement object article is formed so as to extend in at least one direction, wherein the reference scale has plural graduations which have been formed by utilizing a focused ion beam FIB and adjacently disposed for every spacing having been previously determined.
Claims12
A substrate possessing:
- a substrate main body in whose surface there is formed a measurement object article, and
- a reference scale having been provided, on the surface of the substrate main body, in the vicinity of a region where the measurement object article is formed so as to extend in at least one direction,
- wherein the reference scale has plural graduations which have been formed by utilizing a focused ion beam and adjacently disposed for every spacing having been previously determined.
A method of making a reference scale, which makes the reference scale in the vicinity of a region, where a measurement object article is formed, on a surface of a substrate main body in whose surface there is formed the measurement object article,
- characterized by possessing a working process which performs a working while relatively moving the substrate main body and an irradiation axis of a focused ion beam in a direction parallel to the surface of the substrate main body and scanning the focused ion beam toward at least one direction such that plural graduations are adjacently disposed for every spacing having been previously determined.
A method of measuring a length of a micro structure, which measures the length of the micro structure in which there has been formed a measurement object article in a substrate having a substrate main body in whose surface there is formed the measurement object article, and a reference scale having plural graduations which, on the surface of the substrate main body, have been formed by utilizing a focused ion beam in the vicinity of a region, where the measurement object article is formed, so as to extend in at least one direction, and which have been adjacently disposed for every spacing having been previously determined,
- wherein a length measurement of the measurement object article is performed by comparing the plural graduations with the measurement object article, thereby making the graduation a reference.
Dependencies are inferred from the claim text.