Oxidation resistane strcuture for metal insulatormetal capacitor

A method for fabricating the micro thermo-electric bio-element, comprising:

• providing at least two semiconductor wafer substrates;
• forming a first dielectric layer in a first surface of each of said semiconductor wafer substrates;
• forming a patterned electrical interconnecting layer in each of said first dielectric layer;
• forming a patterned second dielectric layer in each of said patterned electrical interconnecting layer, wherein said patterned second dielectric layer define a plurality of first openings in each of said patterned electrical interconnecting layer;
• filling a conductively adhesive layer in each of said first opening;
• removing parts of said semiconductor wafer substrate in one second surface of one of two semiconductor wafer substrate;
• disposing a thermo-electric material structure in each of said first opening of any of said semiconductor wafer substrate and contacted with said conductive adhesive layer;
• and
• fixing said two semiconductor wafer substrates by way of flip-chip bonding, wherein said thermo-electric material structure is contacted with said conductively adhesive layer in each of said first opening of each of said semiconductor wafer substrate.