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US 2006/0216636 A1Published application
Catalytic resist including metal precursor compound and method of patterning catalyst particles using the same
AssigneeSamsung Electronics Co., Ltd.
InventorsYo-sep Min, Eun-ju Bae, Wan-Jun Park
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Abstract
A catalytic resist and a method of patterning catalyst particles using the same are provided. The catalytic resist includes a resist and a metal precursor compound uniformly dispersed in the resist.
Claims20
A catalytic resist comprising:
- a resist;
- and
- a metal precursor compound uniformly dispersed in the resist.
A method of patterning catalyst particles comprising:
- applying a catalytic resist having a resist and a metal precursor compound uniformly dispersed in the resist on a substrate;
- forming a catalytic resist pattern by patterning the catalytic resist in a predetermined shape;
- and
- depositing catalyst particles at predetermined sites by removing organic substances from the catalytic resist pattern.
1 more element
Dependencies are inferred from the claim text.