System for control of gas injectors
AssigneeASM America, Inc.
InventorsMichael Todd, Keith Weeks, Paul Jacobson
Life of this patent
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Abstract
A substrate processing system has computer controlled injectors. The computer is configured to adjust a plurality of injectors, such as during deposition of a graded layer, between depositions of two different layers, or between deposition and chamber clean steps.
Claims64
A method of forming a layer on a substrate comprising:
- loading a substrate into a process chamber;
- injecting initial process gases from injectors across the substrate;
- adjusting the injectors after injecting the initial process gases;
- and
- injecting additional process gases through the injectors and across the substrate after adjusting the injectors, but before removing the substrate from the chamber, to form a layer on the substrate.
A method of performing a process step on a substrate, comprising:
- injecting a gas flow substantially parallel to a surface of the substrate, the gas flow originating from a plurality of injectors having a first configuration;
- providing a new configuration setting for the injectors;
- and
- outputting a control signal from a computer to adjust the injectors to the new configuration setting.
A method of grading a layer of an integrated circuit to have a ratio of a component X to a component Y which varies along a vertical gradient comprising:
- injecting a gas from injectors onto a substrate;
- and
- altering the configuration of the injectors while depositing the layer.
A substrate processing system comprising:
- an enclosed reaction space;
- a substrate holder in the reaction space;
- a computer;
- a plurality of injectors oriented to produce a substantially horizontal process flow, each one of the plurality of injectors having an injector control mechanism controllably linked to the computer.
An injection system for use in a substrate process chamber comprising:
- a bank of laterally arrayed injectors;
- a computer-controlled injector adjustment mechanism having a computer interface allowing the mechanism to be controlled by a computer.
Dependencies are inferred from the claim text.