Carrying apparatus and carrying control method for sheet-like substrate

Abstract

The present invention relates to a transporting apparatus and a transporting control method for thin plates, the apparatus for transporting the thin plates such as liquid crystal display panels and glass plates into a processing chamber, comprising a rather large robot (14) having rotating arms (16) for transporting large-sized thin plates. The transporting apparatus and a thin plate transporting system can stably raise the plates up to the heights of approximately 2 m and can transporting the plates with the deflected amount of the extended rotating arms (16) compensated. A horizontal support table (13) liftably cantilevered on two upright support members (12) is provided in the apparatus, and the transporting robot (14) with the rotating arms (16) is placed on the horizontal support table (13). Also, the deflected amount of the extended rotating arms is compensated by raising the height of the horizontal support table (13) based on the deflected amount. The deflected amount can also be compensated by varying the installation angle of the robot (14) placed on the horizontal support table (13).

Dependencies are inferred from the claim text.