Processing apparatus and recording medium

A recording medium storing a program configured to cause a computer to execute transfer of a substrate to a temporary storage unit by a carrier arm, the program comprising:

• a vibration detection module detecting, by using a vibration sensor, vibration occurred from a substrate loading part of the temporary storage unit at the time of the substrate being loaded on the substrate loading part by the carrier arm;
• a judgment module judging whether or not the vibration is abnormal vibration by comparing a current detection value of the vibration sensor with a predetermined set value;
• and
• a carrier arm stop module stopping the carrier arm when the judgment module judges the vibration to be the abnormal vibration.

A recording medium storing a program configured to cause s a computer to execute transfer of a substrate to a temporary storage unit by a carrier arm, the program comprising:

• a vibration detection module detecting, by using a vibration sensor, vibration occurred from a substrate loading part of the temporary storage unit at the time of the substrate being loaded on the substrate loading part by the carrier arm;
• a judgment module judging whether or not the vibration is abnormal vibration by comparing a current detection value of the vibration sensor with a predetermined set value;
• and
• a substrate damage detection module detecting the substrate being damaged in a peripheral edge portion, based on the judgment of the abnormal vibration by the judgment module.

A recording medium storing a program configured to cause a computer to execute transfer of a substrate to a temporary storage unit by a carrier arm, the program comprising:

• a vibration detection module detecting, by using a vibration sensor, vibration occurred from a substrate loading part of the temporary storage unit at the time of the substrate being loaded on the substrate loading part by the carrier arm;
• a judgment module judging whether or not the vibration is abnormal vibration by comparing a current detection value of the vibration sensor with a predetermined set value;
• and
• a displacement detection module detecting the substrate being displaced in a process chamber or on a transfer route, based on the judgment of the abnormal vibration by the judgment module.