US 2006/0215338 A1 · Method for electrically discharging substrate, substrate processing apparatus and program

Abstract

The present invention provides a substrate processing apparatus that executes electrical discharge processing before detaching a substrate held onto an electrostatic chuck of a lower electrode constituting a stage and undergoing a specific type of processing from the electrostatic chuck. Before electrically discharging the substrate, a decision is made as to whether or not the specific type of processing on the substrate has ended normally, and electrical discharge conditions are set based upon regular electrical discharge condition information stored at a regular electrical discharge condition information storage means if the substrate processing is judged to have ended normally, whereas electrical discharge conditions are set based upon non-regular electrical discharge condition information stored at a non-regular electrical discharge condition information storage means if the substrate processing is judged not to have ended normally. Then, under the electrical discharge conditions having been set, electrical discharge processing is executed on the substrate.

Claims30

Dependent claims

A method for electrically discharging a substrate held onto a stage disposed inside a processing chamber and undergoing a specific type of processing before detaching the substrate from said stage, comprising:

an electrical discharge condition setting step in which a decision is made as to whether or not the specific type of processing on the substrate has ended normally, electrical discharge conditions are set based upon regular electrical discharge condition information stored at a regular electrical discharge condition information storage means if the processing is determined to have ended normally and electrical discharge conditions are set based upon non-regular electrical discharge condition information stored at a non-regular electrical discharge condition information storage means if the processing is determined not to have ended normally, before electrically discharging the substrate;
and
an electrical discharge processing execution step in which electrical discharge processing is executed on the substrate based upon said electrical discharge conditions having been set in the electrical discharge condition setting step.

A substrate processing apparatus that electrically discharges a substrate held onto a stage disposed inside a processing chamber and undergoing a specific type of processing before detaching the substrate from said stage, comprising:

a regular electrical discharge condition information storage means for storing regular electrical discharge condition information;
a non-regular electrical discharge condition information storage means for storing non-regular electrical discharge condition information;
an electrical discharge condition setting means for making a decision as to whether or not the specific processing on the substrate has ended normally, setting electrical discharge conditions based upon said regular electrical discharge condition information at said regular discharge condition information storage means if the processing is determined to have ended normally and setting electrical discharge conditions based upon said non-regular electrical discharge condition information at said non-regular electrical discharge condition information storage means if the processing is determined not to have ended normally before electrically discharging the substrate;
and
an electrical discharge processing execution means for executing electrical discharge processing on the substrate based upon said electrical discharge conditions having been set by said electrical discharge condition setting means.

2 more elements

A program that enables execution of electrical discharge processing on a substrate held onto a stage disposed inside a processing chamber and undergoing a specific type of processing before detaching the substrate from said stage, that enables a computer to execute;

an electrical discharge condition setting procedure in which a decision is made as to whether or not the specific type of processing on the substrate has ended normally, electrical discharge conditions are set based upon regular electrical discharge condition information stored at a regular electrical discharge information storage means if the processing is determined to have ended normally and electrical discharge conditions are set based upon non-regular electrical discharge condition information stored at a non-regular electrical discharge condition information storage means if the processing is determined not to have ended normally before a electrically discharging the substrate;
and
an electrical discharge processing execution procedure in which said electrical discharge processing is executed on the substrate based upon said electrical discharge conditions having been set.

Dependencies are inferred from the claim text.

Method for electrically discharging substrate, substrate processing apparatus and program

Life of this patent

Method for electrically discharging substrate, substrate processing apparatus and program

Life of this patent

Abstract

Claims30