Substrate processing apparatus and substrate housing method
AssigneeOlympus Corporation
InventorKatsuyuki Hashimoto
Life of this patent
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Abstract
A substrate housing method for a substrate processing apparatus, including: a first step of transporting the substrate taken out from a housing case to the substrate processing apparatus by a transport means; a third step of processing the substrate at the substrate processing apparatus; a fourth step of returning the substrate after the third step to the housing case by the transport means; a second step of calculating a difference in amount in relation to a normal position of the substrate at the transport means from the first step and before the fourth step; and a fifth step of adjusting a returning position of the substrate in the housing case after the third step and until the fourth step.
Claims11
A substrate housing method for a substrate processing apparatus, comprising:
- a first step of delivering the substrate taken out from a housing case to the substrate processing apparatus by a transport unit;
- a second step of processing the substrate at the substrate processing apparatus;
- a third step of taking the substrate after processing from the substrate processing apparatus by the transport unit;
- a fourth step of returning the substrate after processing to the housing case by the transport unit;
- a first process of calculating a difference in amount in relation to a normal position of the substrate at the transport unit while in time starting with the first step and before the fourth step;
- and
- a second process of adjusting a returning position of the substrate in the housing case based on the calculated difference in amount while in time after the first process and before the fourth step.
A substrate processing apparatus comprising:
- a processing apparatus which processes a substrate taken out of a housing case;
- a transport unit which transports the substrate from the processing apparatus to the housing case that houses the substrate;
- a difference calculation portion which calculates a difference in the substrate in relation to a normal position of the substrate at the transport unit;
- and
- a difference adjustment unit which adjusts a returning position of the substrate in the housing case based on the difference in amount calculated by the difference calculation unit.
Dependencies are inferred from the claim text.