Positioning apparatus and method for manufacturing same
AssigneeCanon Kabushiki Kaisha
InventorHiroyoshi Kubo
Life of this patent
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Abstract
A positioning apparatus includes a wafer chuck which retains a wafer and a hollow plate unit which retains the chuck, which is composed of a ceramic material in an integral, hollow structure having a hollow section, the hollow section having a rib structure which serves to increase the natural frequency of the hollow plate unit with respect to torsional mode vibration, and which has holes for providing connection between the interior and exterior of the hollow section. The rib structure is constructed such that a rib unit having a rectangular shape in cross section, the sides thereof extending along X and Y fine movement directions, and a rig unit having a diamond shape in cross section are alternately disposed inside each other and are bonded to each other.
Claims33
A positioning apparatus which moves an object, said apparatus comprising:
- a first plate unit that retains the object;
- and
- a second plate unit that retains said first plate unit, said second plate unit composed of a ceramic material and comprising a hollow structure having a hollow section, said hollow structure including a rib and holes that provide a connection between an interior and an exterior of the hollow section.
A positioning apparatus which moves an object, said apparatus comprising:
- a first plate unit that retains the object;
- and
- a second plate unit that retains said first plate unit, said second plate unit composed of a ceramic material and comprising a rib and a plurality of side plates on a periphery of said second plate unit, wherein said rib extends from an intermediate region of one of said plurality of side plates to an intermediate region of another of said plurality of side plates, the intermediate region of each side plate of said plurality of side plates being separated from an end of said each side plate.
A positioning apparatus which moves an object, said apparatus comprising:
- a first plate unit that retains the object;
- and
- a second plate unit that retains said first plate unit, said second plate unit composed of a ceramic material and comprising a hollow structure having a hollow section, said hollow structure including a rib and a plurality of side plates on a periphery of said second plate unit, wherein said rib extends from an intermediate region of one of said plurality of side plates to an intermediate region of another of said plurality of side plates, the intermediate regions of each side plate of said plurality of side plates being separated from an end of said each side plate.
Dependencies are inferred from the claim text.