Stage drive method, stage apparatus, and exposure apparatus
AssigneeNikon Corporation
InventorYuichi Shibazaki
Life of this patent
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Abstract
A stage drive method for driving a stage on a surface of a surface plate along a guide part that extends in a first direction includes the step of rotating the guide part about an axis perpendicular to the surface based on a thrust occurring when the stage is driven in the first direction. It is possible to increase safety without causing gap collapse to occur even in the case where a moment load is applied to the guide part.
Claims12
A stage drive method for driving a stage on a surface of a surface plate along a guide part that extends in a first direction, comprising the step of:
- rotating the guide part about an axis perpendicular to the surface based on a thrust occurring when the stage is driven in the first direction.
A stage apparatus that drives a stage on a surface of a surface plate along a guide part that extends in a first direction;
- comprising:
- a rotary drive apparatus that rotates and drives the guide part about an axis perpendicular to the surface based on a thrust occurring when the stage is driven in the first direction.
Dependencies are inferred from the claim text.