Electro-optic device, method for manufacturing the same, and electronic apparatus

A method for manufacturing an electro-optic device including a data line and a scanning line extending so as to intersect each other, a transistor, a storage capacitor, and a display electrode on a substrate, the method comprising:

• forming the transistor in a region on the substrate corresponding to the intersection of the data line and the scanning line when viewed from above;
• forming the data line above the transistor;
• forming the storage capacitor by depositing an lower electrode, a dielectric film, and an upper electrode in that order above the data line, thereby defining an island-shaped region where the upper electrode and the lower electrode oppose each other with the dielectric film therebetween;
• and
• forming the display electrode so as to be electrically connected to the storage capacitor and the transistor,
• wherein the step of forming the storage capacitor includes:
• forming a spacer insulating film in an outer region surrounding the island-shaped region above an underlayer of the lower electrode and below the upper electrode;
• and extending the upper electrode so as to partially cover the spacer insulating film, and the spacer insulating film increases the distance between the ends of the lower electrode and the upper electrode in comparison with the case where the spacer insulating film is not provided.