Front-wing cantilever for the conductive probe of electrical scanning probe microscopes

Abstract

The present invention discloses a front-wing cantilever for the conductive probe of electrical scanning probe microscopes, wherein two symmetrical front wings are installed to extend from two lateral sides of the front end of the cantilever so that those two front wings are positioned on two lateral sides of the conductive tip. The front-wing structure of the cantilever can effectively inhibit the optical perturbation in the electrical scanning probe microscopes and obviously promote the analysis accuracy thereof. The front-wing structure can provide the scanned region with an effective dark field lest the optical absorption appears in the scanned region of semiconductor specimen and inhibit the optical perturbation occurs during the measurement and analysis of the differential capacitance.

Dependencies are inferred from the claim text.