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US 2006/0214235 A1Published application
Semiconductor device
AssigneeSeiko Instruments Inc.
InventorHirofumi Harada
Life of this patent
Estimating the term…
Abstract
A Plurality of resistor groups composed of polycrystalline silicon resistors constitutes a resistor circuit. A plurality of metal portions each having the same area is formed above each of the resistor groups to make the influence of external disturbances on the metal portions in a semiconductor process uniform, and thus reducing resistance fluctuation in the polycrystalline silicon resistors.
Claims13
A semiconductor device comprising:
- a semiconductor substrate;
- a first insulating film placed on the semiconductor substrate;
- a plurality of resistors made of polycrystalline silicon and disposed on the first insulating film, each of the resisters having a low concentration impurity region and high concentration impurity regions at both end;
- a second insulating film disposed on the plurality of resistors;
- a contact hole disposed in the second insulating film on each of the high concentration impurity regions;
- a metal wiring connected to the contact hole for connecting a portion of the plurality of resistors;
- and
- a plurality of metal portions having substantially the same area and disposed on the second insulating film to cover the low concentration impurity region of the plurality of the resistors.
5 more elements
A semiconductor device comprising:
- a semiconductor substrate;
- a first insulating film placed on the semiconductor substrate;
- a plurality of resistors made of polycrystalline silicon and disposed on the first insulating film, having the same shape, each of the plurality of resistors having a low concentration impurity region and high concentration impurity regions at both end;
- a second insulating film disposed on the plurality of resistors;
- a contact hole disposed in the second insulating film on each of the high concentration impurity regions;
- a metal wiring connected to the contact hole for connecting a portion of the plurality of resistors;
- and
- a plurality of metal portions having substantially the same area and disposed on the second insulating film to cover the low concentration impurity region of a plurality of resistor groups each obtained by connecting one or more of the resistors.
5 more elements
Dependencies are inferred from the claim text.