Laser nozzle cleaning tool
AssigneeSematech, Inc.
InventorAbbas Rastegar
Life of this patent
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Abstract
An apparatus including a laser operating in different cleaning techniques is provided. In one embodiment, the laser interacts with the particle to remove the particle by expansion. In another embodiment, a liquid-assisted laser cleaning technique evaporates a liquid layer on the surface by laser pulses and subsequently removing the particles from the surface. Further, the present disclosure provides parameters to control the energy transfer to the particle. For example, for a shock wave generation parameters, the droplets size and concentration (e.g., pressure), substrate surface temperature, chemical composition of the droplets may be controlled.
Claims13
An apparatus for removing a contaminant particle from a surface, comprising:
- a surface having contaminant particles thereon;
- a light source;
- and
- a nozzle coupled to the light source, the nozzle operably moveable to a location on the surface having the particles and providing light from the light source operating in a plurality of modes to remove the contaminant particles by expansion.
The apparatus of claim 12 claim 8, further comprising a torriod for applying a magnetic field around the plasma to confine the plasma over the surface
Dependencies are inferred from the claim text.