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US 2006/0213445 A1Published application
Deposition apparatuses
OwnerEric Blomiley, Nirmal Ramaswamy +2inventors
InventorsEric Blomiley, Nirmal Ramaswamy, Ross Dando, Joel Drewes
Life of this patent
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Abstract
The invention includes deposition apparatuses having reflectors with rugged reflective surfaces configured to disperse light reflected therefrom, and/or having dispersers between lamps and a substrate. The invention also includes optical methods for utilization within a deposition apparatus for assessing the alignment of a substrate within the apparatus and/or for assessing the thickness of a layer of material deposited within the apparatus.
Claims9
1-16. (canceled)
A deposition apparatus, comprising:
- a substrate susceptor for receiving a semiconductor wafer substrate;
- one or more lamps for providing radiant energy to the substrate, the radiant energy being in the form of light waves;
- and
- a disperser between at least one of the lamps and the substrate;
- at least some of the light waves being passed through the disperser prior to providing radiant energy to the substrate.
2 more elements
24-67. (canceled)
Dependencies are inferred from the claim text.