Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces

A microfeature workpiece processing system comprising:

• a process chamber adapted to receive a plurality of transversely oriented microfeature workpieces spaced from one another in a longitudinal direction;
• a first gas conduit extending longitudinally within the process chamber and having a plurality of outlets spaced longitudinally along a length of the first gas conduit, the outlets being oriented to direct a first gas flow transversely across surfaces of the microfeature workpieces;
• a second gas conduit having a second outlet oriented to direct a second gas flow longitudinally within the process chamber;
• a first gas supply line adapted to deliver a first gas to the first gas conduit;
• and
• a second gas supply line adapted to deliver a second gas to the second gas conduit.

A microfeature workpiece processing system, comprising:

• a process chamber configured to receive a plurality of microfeature workpieces spaced from one another in a first direction to define process spaces between adjacent workpieces;
• a first gas supply line;
• a second gas supply line;
• a first gas conduit in fluid communication with the first gas supply line and having an outlet length extending in the first direction within the process chamber, the first gas conduit having a plurality of first outlets spaced along the outlet length in the first direction, the first outlets being configured to direct a first gas flow from the first gas conduit transversely into the process spaces;
• a second gas conduit having a second outlet oriented to direct a second gas flow in a direction generally transverse to the first gas flow;
• and
• a controller operatively coupled to the first gas supply line and to the second gas supply line and configured to selectively control the first gas flow and the second gas flow.

A microfeature workpiece processing system, comprising:

• a process chamber having a workpiece area configured to receive a plurality of spaced-apart microfeature workpieces arranged relative to a longitudinal axis of the process chamber;
• a first gas conduit extending longitudinally within the process chamber proximate the workpiece area, the first gas conduit having a plurality of first outlets spaced longitudinally along a length of the first gas conduit, the first outlets being oriented toward the workpiece area and configured to direct a first gas flow transverse to the longitudinal axis;
• a second gas conduit having a second outlet oriented to direct a second gas flow generally parallel to the longitudinally axis within the process chamber;
• a first gas supply line configured to deliver a first gas to the first gas conduit;
• and
• a second gas supply line configured to deliver a second gas to the second gas conduit, the second gas supply line being independent of the first gas supply line and the second gas being different from the first gas.