Optical proximity correction performed with respect to limited area
AssigneeFujitsu Limited
InventorsMitsuo Sakurai, Masahiko Minemura
Life of this patent
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Abstract
A method of performing optical proximity effect correction includes defining a partial area of an entire area of a mask pattern, the mask pattern including a real pattern and a dummy pattern, and performing optical proximity effect correction only with respect to the partial area.
Claims10
A method of performing optical proximity effect correction, comprising:
- defining a partial area of an entire area of a mask pattern, the mask pattern including a real pattern and a dummy pattern;
- and
- performing optical proximity effect correction only with respect to said partial area.
A memory medium having mask pattern data stored therein, said mask pattern data comprising:
- a real pattern;
- and
- a dummy pattern,
- wherein the mask pattern data excluding at least a portion of the dummy pattern are patterns corrected for optical proximity effect.
A memory medium having a program embodied therein for causing a computer to perform optical proximity effect correction, said program comprising program-code steps of:
- defining a partial area of an entire area of a mask pattern, the mask pattern including a real pattern and a dummy pattern;
- and
- performing optical proximity effect correction only with respect to said partial area.
A system for performing optical proximity effect correction, comprising:
- a unit configured to define a partial area of an entire area of a mask pattern, the mask pattern including a real pattern and a dummy pattern;
- and
- a unit configured to perform optical proximity effect correction only with respect to said partial area.
A method of performing optical proximity effect correction, comprising:
- separating an entire area of a mask pattern including a real pattern and a dummy pattern into a first area including at least the real pattern and a second area including at least a portion of the dummy pattern;
- and
- performing optical proximity effect correction only with respect to said first area.
Dependencies are inferred from the claim text.