Roller that avoids substrate slippage
AssigneeApplied Materials, Inc.
InventorsBrian Brown, Michael Sugarman, Makoto Inagawa, Daniel Ramar, Alexander Lerner
Life of this patent
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Abstract
A roller assembly is provided. The roller assembly comprises a groove that includes two opposing surfaces. The roller assembly comprises either frictional surfaces positioned along the groove, or O-ring(s) coupled to the groove. The frictional surfaces may be a plurality of holes at spaced intervals along the opposing surfaces of the groove, a plurality of holes, each hole sized so as to extend into the two opposing surfaces, at spaced intervals along the opposing surfaces of the groove, or may be a bead-blasted surface or a knurled surface positioned along the opposing surfaces of the groove.
Claims2
A roller adapted to rotate a thin disk, the roller comprising:
- a groove having a surface adapted to contact an edge of the thin disk;
- and
- at least a first O-ring coupled to the surface.
The apparatus of claim 6 wherein the roller further comprises a second O-ring coupled to the surface such that the edge of the thin disk may be inserted between the first O-ring and the second O-ring.
Dependencies are inferred from the claim text.