Semiconductor device and method of manufacturing the same
AssigneeKabushiki Kaisha Toshiba
InventorsMasaru Kidoh, Hideaki Aochi, Ryota Katsumata, Masaru Kito, Hitomi Yasutake
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AssigneeKabushiki Kaisha Toshiba
InventorsMasaru Kidoh, Hideaki Aochi, Ryota Katsumata, Masaru Kito, Hitomi Yasutake
Estimating the term…
A semiconductor device includes a semiconductor substrate, a trench formed in the semiconductor substrate, an island-like element region formed in the semiconductor substrate, having an upper surface, first to third side surfaces, an upper portion, a middle portion and a lower portion, a gate insulating film formed on the first to third side surfaces in the upper portion of the element region, a gate electrode having first and second bottom surfaces, a first diffusion layer formed along the upper surface of the element region, a second diffusion layer formed along the first side surface in the middle portion of the element region, a channel region having first to third regions formed along the first to third side surfaces in the upper portion of the element region, a capacitor formed in the trench, and a bit line electrically connected to the first diffusion layer.
A semiconductor device comprising:
A method of manufacturing a semiconductor device, comprising:
Dependencies are inferred from the claim text.