Structure and method for integrating mim capacitor in beol wiring levels
AssigneeInternational Business Machines Corporation
InventorsDouglas Coolbaugh, Vidhya Ramachandran
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Abstract
A method for integrating a metal-insulator-metal (MIM) capacitor in back end of line (BEOL) wiring levels of a semiconductor device includes forming an isolating layer over a lower wiring level, forming a bottom electrode of the capacitor on the isolating layer, and forming an interlevel dielectric material on the isolating layer and the bottom electrode. A capacitor dielectric is formed on the bottom electrode and a top electrode of the capacitor is formed on the capacitor dielectric, wherein the top electrode is formed concurrently with an upper wiring level, the upper level being the next successive wiring level with respect to the lower wiring level.
Claims20
A method for integrating a metal-insulator-metal (MIM) capacitor in back end of line (BEOL) wiring levels of a semiconductor device, the method comprising:
- forming an isolating layer over a lower wiring level;
- forming a bottom electrode of the capacitor on said isolating layer;
- forming an interlevel dielectric material on said isolating layer and said bottom electrode;
- forming a capacitor dielectric on said bottom electrode and forming a top electrode of the capacitor on said capacitor dielectric;
- wherein said top electrode is formed concurrently with an upper wiring level, said upper level being the next successive wiring level with respect to said lower wiring level.
A metal-insulator-metal (MIM) capacitor for back end of line (BEOL) wiring levels of a semiconductor device, comprising:
- a bottom electrode disposed over and isolated from a lower wiring level;
- a capacitor dielectric formed on said bottom electrode and a top electrode formed on said capacitor dielectric;
- wherein said top electrode is integrated with an upper wiring level, said upper level being the next successive wiring level with respect to said lower wiring level.
Dependencies are inferred from the claim text.