Fast swap dual substrate transport for load lock

A load lock system constructed to supply semiconductor substrates to a process chamber according to a predetermined sequence, said process chamber processing said substrate in a process cycle, said load lock system comprising:

• a housing having a load lock chamber constructed therein, said load lock chamber connected to said process chamber by a process port and to a front end delivery module by a delivery port;
• a first valve for opening and closing said process port according to said predetermined sequence;
• a second valve for opening and closing said delivery port according to said predetermined sequence;
• a pump for pumping said load lock chamber to a vacuum when said first and second valves are closed;
• a transport, mounted in the load lock chamber, constructed to move substrates into said process chamber for processing, said transport further comprising:
• a lower arm mounted in the load lock chamber at a proximal end of said arm for pivotal motion about a first axis, said lower arm connected to a first drive element of a drive mechanism to provide a controlled rotation of said lower arm about said first axis;
• at least one effector arm mounted on a distal end of said lower arm for pivotal motion about a second axis parallel to said first axis, said effector arm having a receiving end for engagement of said substrates and being connected to a second drive of said drive mechanism to provide a controlled rotation about said second axis;
• and
• a process controller connected to said process chamber, first and second valves and biaxial drive for controlling the operation thereof in said predetermined sequence;
• wherein said predetermined sequence is timed to cycle said load lock chamber within the process cycle of said processing chamber.