Direct tool loading
AssigneeAsyst Technologies, Inc.
InventorsAnthony Bonora, Michael Krolak, Roger Hine
Life of this patent
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AssigneeAsyst Technologies, Inc.
InventorsAnthony Bonora, Michael Krolak, Roger Hine
Estimating the term…
The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.
1-20. (canceled)
A system for presenting a container storing at least one article to a processing tool, comprising:
24-25. (canceled)
28-35. (canceled)
In a semiconductor fabrication facility having a conveyor for movably supporting a container along a first rail and a second rail between processing tools, a load port comprising:
In a semiconductor fabrication facility having a conveyor for movably supporting a container, storing at least one article, between processing tools, the conveyor being adapted to move the container substantially along a container transport plane, a load port comprising:
Dependencies are inferred from the claim text.